Spatial ALD for energy applications; from R&D to mass production
01.03.2023 von 14:00 - 14:20
ICM Saal 13b
Vortragsart: Oral Presentation Invited
In this presentation we will show how we bring ALD for energy application to mass production, using atmospheric pressure Spatial ALD. Furthermore, we will show how can we can scale-up Spatial ALD processes to very large area substrates (e.g square meters) and roll-to-roll for mass production of next generation electrolysers, fuel cells, and batteries.